A 1.6-mm, metal tube ultrasonic motor

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Date

2003

Authors

Cagatay, S
Koc, B
Uchino, K

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Ieee-inst Electrical Electronics Engineers inc

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Abstract

A miniaturized metal tube ultrasonic motor, the dimensions of which are 1.6 mm in diameter and 6 rum in length, was developed. Two flattened surfaces with 90-degrees were ground on the outer surface of the stator. Two PZT-based piezoelectric ceramics were bonded onto these flat surfaces. The asymmetrical surface of the stator developed the split of the two degenerated orthogonal bending modes, resulting in a wobble motion. The working frequency of the 1.6-mm motor with 6 mm in length was 130 kHz. A torque of 0.5 mNm was reached at a maximum power of 45 mW with a speed of 45 rad/sec. The maximum efficiency was 16%.

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Uchino, Kenji/0000-0003-1651-7912

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Citation

102

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Volume

50

Issue

7

Start Page

782

End Page

786

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