Performance evaluation of self-mixing interferometer with the ceramic type piezoelectric accelerometers

Abstract

In this article, reconstructed displacement from the self-mixing signal is compared with the displacement obtained by the ceramic shear mode design piezoelectric accelerometer. Piezoelectric accelerometers are widely accepted due to the low output noise and wide frequency range, but nevertheless it is not contact-free. Self-mixing interferometric signals due to the vibrating target on which an accelerometer is attached are acquired by an external silicon type photodetector. The laser light hits directly the accelerometer as a target which is driven by the sum of two different sinusoidal frequencies of 150 and 300 Hz with different voltage levels.