Enhancement of Laser Damage Resistance at 1064 Nm of High and Anti-Reflective Optical Multilayers by Tailoring the Electric Field Distribution and Post-Annealing

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2016

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Soc Vacuum Coaters

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Computer Engineering
(1998)
The Atılım University Department of Computer Engineering was founded in 1998. The department curriculum is prepared in a way that meets the demands for knowledge and skills after graduation, and is subject to periodical reviews and updates in line with international standards. Our Department offers education in many fields of expertise, such as software development, hardware systems, data structures, computer networks, artificial intelligence, machine learning, image processing, natural language processing, object based design, information security, and cloud computing. The education offered by our department is based on practical approaches, with modern laboratories, projects and internship programs. The undergraduate program at our department was accredited in 2014 by the Association of Evaluation and Accreditation of Engineering Programs (MÜDEK) and was granted the label EUR-ACE, valid through Europe. In addition to the undergraduate program, our department offers thesis or non-thesis graduate degree programs (MS).

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In this study, multilayer Ta2O5/SiO2 and HfO2/SiO2 films were deposited on glass substrates by ion beam sputtering and physical vapor deposition methods, respectively. The effect of electric field distribution and heat treatment of these oxide multilayers on laser damage resistance were investigated systematically. Optical performance was characterized by spectrophotometer. Electric field analysis and optic system design were performed by thin film design software. LIDT (laser-induced damage threshold) measurements were applied at 1064 nm to obtain laser damage values of optical coatings. Damage images were characterized by a Nomarski (with dark field type) microscope. It was observed that the LIDT value of HfO2/SiO2 anti-reflective optical films increases to 34 J/cm(2) when they are post-annealed at 350 degrees C. On the other hand, measured LIDTs as high as 26 J/cm(2) were achieved by tailoring the electric field distribution of high reflective coatings.

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59th Annual Technical Conference of the Society-of-Vacuum-Coaters (SVC) -- MAY 09-13, 2016 -- Indianapolis, IN

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247

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251

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https://doi.org/10.14332/svc16.proc.0027
 https://hdl.handle.net/20.500.14411/555

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