Durkaya, G.Efeoglu, I.Ersoy, K.Cetin, B.Kurtuldu, H.Department of Metallurgical and Materials Engineering15. Graduate School of Natural and Applied Sciences01. Atılım University2024-07-052024-07-0520190587-42461898-794X10.12693/APhysPolA.135.7432-s2.0-85071154704https://doi.org/10.12693/APhysPolA.135.743https://hdl.handle.net/20.500.14411/3353Kurtuldu, Huseyin/0000-0003-0876-4999Cubic boron nitride is a coating solution to improve wear performances in demanding engineering applications. In order to achieve the best performance from this thin film system, the physical dynamics behind the phase compositions, phonon dynamics, surface quality, interfacial effects and stoichiometric relations should be understood. In this study, for this purpose, physical vapor deposition grown BN thin films were studied in detail using the Raman spectroscopy, atomic force microscopy, and scanning electron microscopy techniques.eninfo:eu-repo/semantics/openAccess[No Keyword Available]Conference Object