Cagatay, SKoc, BUchino, K2024-07-052024-07-0520031020885-301010.1109/TUFFC.2003.12144982-s2.0-0042764344https://doi.org/10.1109/TUFFC.2003.1214498https://hdl.handle.net/20.500.14411/1077Uchino, Kenji/0000-0003-1651-7912A miniaturized metal tube ultrasonic motor, the dimensions of which are 1.6 mm in diameter and 6 rum in length, was developed. Two flattened surfaces with 90-degrees were ground on the outer surface of the stator. Two PZT-based piezoelectric ceramics were bonded onto these flat surfaces. The asymmetrical surface of the stator developed the split of the two degenerated orthogonal bending modes, resulting in a wobble motion. The working frequency of the 1.6-mm motor with 6 mm in length was 130 kHz. A torque of 0.5 mNm was reached at a maximum power of 45 mW with a speed of 45 rad/sec. The maximum efficiency was 16%.eninfo:eu-repo/semantics/closedAccess[No Keyword Available]ArticleQ1507782786WOS:00018421110000412894912