Micro piezoelectric ultrasonic motors
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Date
2004
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Publisher
Springer
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Abstract
This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5 mm in diameter and 0.8 mN.m in torque have been actually developed.
Description
Dong, Shuxiang/0000-0002-9617-6013; Uchino, Kenji/0000-0003-1651-7912
Keywords
ultrasonic motor, piezoelectric actuator, standing wave motor
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Citation
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Source
International Conference on Electroceramics (ICE 2003) -- AUG 03-07, 2003 -- MIT, Cambridge, MA
Volume
13
Issue
1-3
Start Page
393
End Page
401